Research

LEO 1530 Thermally-Assisted Field Emission (TFE) SEM

Location: Room 159, Love Building

 • state-of-the-art, yielding 1 nm resolution at 20 kV and 3 nm at 1 kV

 • operating voltage range (200 V – 30 kV)

 • Large specimen chamber and eucentric stage

 • Thin window energy dispersive spectrometer (EDS)

 • High probe current for electron backscatter diffraction (EBSD)