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LEO 1530 Thermally-Assisted Field Emission (TFE) SEM Location: Room 159, Love Building • state-of-the-art, yielding 1 nm resolution at 20 kV and 3 nm at 1 kV • operating voltage range (200 V – 30 kV) • Large specimen chamber and eucentric stage • Thin window energy dispersive spectrometer (EDS) • High probe current for electron backscatter diffraction (EBSD) |
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